File:64 nm pitch EUV shot noise.png
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64_nm_pitch_EUV_shot_noise.png (142 × 138 pixels, file size: 25 KB, MIME type: image/png)
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Summary[edit]
Description64 nm pitch EUV shot noise.png |
English: A set of holes patterned at 64 nm pitch shows significant effects of shot noise with an EUV dose of just over 10 mJ/cm2. A larger dose would result in the same range of variation over a larger sample size. Ref.: W. Gao et al., Proc. SPIE 8322, 83221D (2012). |
Date | |
Source | Graphic editor |
Author | Guiding light |
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Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License.http://www.gnu.org/copyleft/fdl.htmlGFDLGNU Free Documentation Licensetruetrue |
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Date/Time | Dimensions | User | Comment |
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2017-07-19 04:33 | 142×138× (25918 bytes) | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
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Date/Time | Thumbnail | Dimensions | User | Comment | |
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current | 08:21, 17 November 2018 | 142 × 138 (25 KB) | Tn4196 (talk | contribs) | Transferred from en.wikipedia via #commonshelper |
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Vertical resolution | 37.79 dpc |