File:9 nm half-pitch EUV cuts.png
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9_nm_half-pitch_EUV_cuts.png (482 × 269 pixels, file size: 8 KB, MIME type: image/png)
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Summary[edit]
| Description |
The number of cut masks increases as half-pitch decreases, for either EUV or 193 nm immersion lithography. For 0.33 NA EUV, the resolution for the regular contact hole array pattern is 19 nm half-pitch. For 193 nm immersion lithography, the resolution is 36 nm half-pitch. Switching to 2D SAQP with grid routing allows more flexibility and reduced cuts. * Y. Wang et al., Proc. SPIE 9426, 94260J (2015).
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| Date | |
| Source | Excel drawing |
| Author | Guiding light |
Licensing[edit]
Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
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Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
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Attribution: Guiding light at English Wikipedia
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Original upload log[edit]
The original description page was here. All following user names refer to en.wikipedia.
| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2016-09-23 13:27:15 | 482× 269× | Guiding light | stop at 13 nm |
| 2016-09-23 05:13:26 | 483× 265× | Guiding light | 9 nm half-pitch GR |
| 2016-09-22 05:14:52 | 483× 265× | Guiding light | updated for 18 nm hp |
| 2016-09-21 12:41:33 | 483× 296× | Guiding light | 1 cut for 2D |
| 2016-09-21 07:42:19 | 483× 296× | Guiding light | Add 2D case |
| 2016-09-21 06:20:50 | 482× 286× | Guiding light | correction |
| 2016-09-21 06:11:52 | 482× 295× | Guiding light | Show trend toward limit |
| 2016-09-21 05:58:52 | 288× 274× | Guiding light | Previous violated 19 nm half-pitch lower limit |
| 2016-09-16 15:06:30 | 421× 316× | Guiding light | 4 cuts instead of 8 |
| 2016-09-14 02:06:56 | 421× 316× | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
File history
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 18:50, 8 October 2016 | | 482 × 269 (8 KB) | OgreBot (talk | contribs) | (BOT): Reverting to most recent version before archival |
| 18:50, 8 October 2016 |  | 483 × 265 (11 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2016-09-23 05:13:26 by Guiding light | |
| 18:50, 8 October 2016 |  | 483 × 265 (10 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2016-09-22 05:14:52 by Guiding light | |
| 18:50, 8 October 2016 |  | 483 × 296 (11 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2016-09-21 12:41:33 by Guiding light | |
| 18:50, 8 October 2016 |  | 483 × 296 (11 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2016-09-21 07:42:19 by Guiding light | |
| 18:50, 8 October 2016 |  | 482 × 286 (10 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2016-09-21 06:20:50 by Guiding light | |
| 18:50, 8 October 2016 |  | 482 × 295 (10 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2016-09-21 06:11:52 by Guiding light | |
| 18:50, 8 October 2016 |  | 288 × 274 (4 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2016-09-21 05:58:52 by Guiding light | |
| 18:50, 8 October 2016 |  | 421 × 316 (7 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2016-09-16 15:06:30 by Guiding light | |
| 18:50, 8 October 2016 |  | 421 × 316 (7 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2016-09-14 02:06:56 by Guiding light |
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