File:26 nm pitch vs 52 nm pitch with obscuration.png
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Description26 nm pitch vs 52 nm pitch with obscuration.png | |
Date | |
Source | Own work |
Author | Guiding light |
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I, the copyright holder of this work, hereby publish it under the following license:
This file is licensed under the Creative Commons Attribution-Share Alike 4.0 International license.
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- to share – to copy, distribute and transmit the work
- to remix – to adapt the work
- Under the following conditions:
- attribution – You must give appropriate credit, provide a link to the license, and indicate if changes were made. You may do so in any reasonable manner, but not in any way that suggests the licensor endorses you or your use.
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References[edit]
- ↑ B. Bilski et al., Proc. SPIE 11177, 111770I (2019).
- ↑ B. Kneer et al., Proc. SPIE 9422, 94221G (2015).
- ↑ Idiosyncrasies of Obstructed High NA EUV Imaging
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Date/Time | Thumbnail | Dimensions | User | Comment | |
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current | 02:49, 21 November 2021 | 811 × 361 (48 KB) | Guiding light (talk | contribs) | Uploaded own work with UploadWizard |
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21 November 2021
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4d510134f213fce5fcf8bfb1ccfbcbcaed794495
49,565 byte
361 pixel
811 pixel
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