File:7nm BEOL Double Patterning.png

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7nm_BEOL_Double_Patterning.png ‎(577 × 526 pixels, file size: 8 KB, MIME type: image/png)

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Summary

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Description For 7nm BEOL, metal minimum pitch is 30-40 nm, while the perpendicular pitch (aligned to gates) is 80-110 nm. Self-aligned spacer patterning with one block mask may be used for metal patterning as an alternative to LELELE, while a single mask may be used for self-aligned via patterning. Top: target pattern. Bottom: mask decomposition.
Date
Source Excel drawing
Author Guiding light

Licensing

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Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
GNU head Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License.
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Attribution: Guiding light at English Wikipedia
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Original upload log

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The original description page was here. All following user names refer to en.wikipedia.
Date/Time Dimensions User Comment
2017-11-03 08:47:05 577 × 526 Guiding light
2017-11-03 08:38:19 577 × 526 Guiding light
2017-11-03 07:19:20 577 × 526 Guiding light
2017-11-03 06:05:14 609 × 526 Guiding light
2017-11-03 05:57:30 609 × 526 Guiding light
2017-08-16 13:16:15 780 × 697 Guiding light
2017-08-16 09:03:37 577 × 526 Guiding light
2017-08-16 08:17:45 577 × 526 Guiding light
2017-08-16 05:02:38 609 × 442 Guiding light
2017-08-15 03:15:02 672 × 581 Guiding light Reverted to version as of 13:09, 13 August 2017 (UTC)
2017-08-14 15:56:29 676 × 552 Guiding light
2017-08-14 14:47:05 676 × 552 Guiding light
2017-08-14 14:38:08 672 × 552 Guiding light
2017-08-14 03:21:06 672 × 552 Guiding light Reverted to version as of 13:02, 13 August 2017 (UTC)
2017-08-13 13:09:10 672 × 581 Guiding light
2017-08-13 13:02:55 672 × 552 Guiding light
2017-08-13 13:02:12 672 × 552 Guiding light
2017-08-13 11:47:10 687 × 581 Guiding light
2017-08-13 11:42:15 687 × 581 Guiding light
2017-08-02 12:09:05 672 × 581 Guiding light
2017-08-02 12:08:02 671 × 578 Guiding light
2017-08-02 00:27:58 672 × 523 Guiding light Reverted to version as of 13:56, 27 July 2017 (UTC)
2017-07-31 10:55:32 672 × 519 Guiding light
2017-07-27 13:56:43 672 × 523 Guiding light
2017-07-27 13:37:41 672 × 523 Guiding light
2017-07-27 13:31:44 672 × 523 Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]

File history

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Date/TimeThumbnailDimensionsUserComment
current02:19, 13 May 2018Thumbnail for version as of 02:19, 13 May 2018577 × 526 (8 KB)OgreBot (talk | contribs)(BOT): Reverting to most recent version before archival
02:19, 13 May 2018Thumbnail for version as of 02:19, 13 May 2018577 × 526 (8 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-11-03 08:38:19 by Guiding light
02:19, 13 May 2018Thumbnail for version as of 02:19, 13 May 2018577 × 526 (8 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-11-03 07:19:20 by Guiding light
02:19, 13 May 2018Thumbnail for version as of 02:19, 13 May 2018609 × 526 (8 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-11-03 06:05:14 by Guiding light
02:19, 13 May 2018Thumbnail for version as of 02:19, 13 May 2018609 × 526 (8 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-11-03 05:57:30 by Guiding light
02:19, 13 May 2018Thumbnail for version as of 02:19, 13 May 2018780 × 697 (14 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-08-16 13:16:15 by Guiding light
02:19, 13 May 2018Thumbnail for version as of 02:19, 13 May 2018577 × 526 (9 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-08-16 09:03:37 by Guiding light
02:19, 13 May 2018Thumbnail for version as of 02:19, 13 May 2018577 × 526 (9 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-08-16 08:17:45 by Guiding light
02:19, 13 May 2018Thumbnail for version as of 02:19, 13 May 2018609 × 442 (8 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-08-16 05:02:38 by Guiding light
02:19, 13 May 2018Thumbnail for version as of 02:19, 13 May 2018676 × 552 (11 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-08-14 15:56:29 by Guiding light
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