File:ALD reactor systems.png
From Wikimedia Commons, the free media repository
Jump to navigation
Jump to search
Size of this preview: 797 × 600 pixels. Other resolutions: 319 × 240 pixels | 638 × 480 pixels | 1,021 × 768 pixels | 1,280 × 963 pixels | 2,572 × 1,935 pixels.
Original file (2,572 × 1,935 pixels, file size: 520 KB, MIME type: image/png)
File information
Structured data
Captions
Summary
[edit]DescriptionALD reactor systems.png |
English: Classification of temporal (A, top) and spatial (B, bottom) ALD reactor systems based on distribution and flow direction of the reactants. Flow-type reactors for temporal ALD include the cross-flow (flow-channel or travelling-wave, A.1), radial-flow channel reactor (A.2), perpendicular-flow reactors based on top-injection (utilizing a showerhead in A.3 or a vortex funnel in A.4 for distribution of the gaseous reactants). Several process variants for productivity increase (batch-wafer reactor in A.5, based on cross-flow reactor) and for particles/powders processing (flow-through reactor in A.6 and fluidized bed reactor in A.7 reactors) are shown. A carousel reactor (B.1) and a roll-to-roll reactor (B.2) for spatial ALD are also illustrated. |
Date | |
Source | Own work |
Author | Aristeidis Goulas, J. Ruud van Ommen, Riikka L. Puurunen |
Licensing
[edit]I, the copyright holder of this work, hereby publish it under the following license:
This file is licensed under the Creative Commons Attribution 4.0 International license.
- You are free:
- to share – to copy, distribute and transmit the work
- to remix – to adapt the work
- Under the following conditions:
- attribution – You must give appropriate credit, provide a link to the license, and indicate if changes were made. You may do so in any reasonable manner, but not in any way that suggests the licensor endorses you or your use.
File history
Click on a date/time to view the file as it appeared at that time.
Date/Time | Thumbnail | Dimensions | User | Comment | |
---|---|---|---|---|---|
current | 04:37, 22 December 2020 | 2,572 × 1,935 (520 KB) | Jrvanommen (talk | contribs) | Uploaded own work with UploadWizard |
You cannot overwrite this file.
File usage on Commons
There are no pages that use this file.
Metadata
This file contains additional information such as Exif metadata which may have been added by the digital camera, scanner, or software program used to create or digitize it. If the file has been modified from its original state, some details such as the timestamp may not fully reflect those of the original file. The timestamp is only as accurate as the clock in the camera, and it may be completely wrong.
Horizontal resolution | 66.14 dpc |
---|---|
Vertical resolution | 66.14 dpc |