File:Asymmetric 2D SAQP with LE2 block.png
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Asymmetric_2D_SAQP_with_LE2_block.png (601 × 378 pixels, file size: 7 KB, MIME type: image/png)
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Summary[edit]
| Description |
English: An asymmetry between x and y pitch could help reduce the number of masks used with SAQP. Here the minimum horizontal pitch is 40 nm while the minimum vertical pitch is 30 nm. Only one block mask (red) is needed. Due to the difference of line pitches, even with EUV SMO, multiple optimized illuminations (and hence, masks) are still needed. Blue: core; Green: 2nd spacer; Yellow: 3rd spacer gap; Red: block. |
| Date | |
| Source | Excel drawing |
| Author | Guiding light |
Licensing[edit]
User:Guiding light, the copyright holder of this work, hereby publishes it under the following licenses:
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Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
This file is licensed under the Creative Commons Attribution-Share Alike 4.0 International license.
Attribution: User:Guiding light
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Original upload log[edit]
Transferred from en.wikipedia to Commons using For the Common Good.
The original description page was here. All following user names refer to en.wikipedia.
| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 04:22, 10 June 2017 | 601 × 378 (7,398 bytes) | w:en:Guiding light (talk | contribs) | New case |
| 21:29, 1 May 2017 | 601 × 378 (8,857 bytes) | w:en:Guiding light (talk | contribs) | |
| 21:11, 1 May 2017 | 601 × 378 (8,912 bytes) | w:en:Guiding light (talk | contribs) | |
| 14:21, 1 May 2017 | 601 × 378 (7,399 bytes) | w:en:Guiding light (talk | contribs) | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
File history
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 02:23, 8 October 2018 | | 601 × 378 (7 KB) | OgreBot (talk | contribs) | (BOT): Reverting to most recent version before archival |
| 02:23, 8 October 2018 |  | 601 × 378 (9 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-05-01 21:29:31 by Guiding light | |
| 02:23, 8 October 2018 |  | 601 × 378 (9 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-05-01 21:11:02 by Guiding light | |
| 02:23, 8 October 2018 |  | 601 × 378 (7 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-05-01 14:21:33 by Guiding light | |
| 01:07, 6 October 2018 |  | 601 × 378 (7 KB) | Arlene the bean (talk | contribs) | Transferred from en.wikipedia: see original upload log above |
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