File:Binary vs PSM NILS.png

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Binary_vs_PSM_NILS.png ‎(481 × 289 pixels, file size: 10 KB, MIME type: image/png)

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Description The tip-to-tip gap NILS for phase-shift masks is superior to that of binary masks (Refs.: C. S. Choi et al., Proc. SPIE 9235, 92351R (2014); www.lithoguru.com/textbook/Chapter10_Figures.ppt, p. 37.) EUV's lack of phase-shift masks handicaps the ability to print gaps between line ends. Dipole illumination is assumed here.
Date
Source Excel
Author Guiding light

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2017-02-05 07:28:46 481 × 289 Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]

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current04:12, 30 March 2017Thumbnail for version as of 04:12, 30 March 2017481 × 289 (10 KB)FastilyClone (talk | contribs)Transferred from en.wikipedia (MTC!)

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