File:Complementary polarity line cutting.png
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Complementary_polarity_line_cutting.png (717 × 437 pixels, file size: 20 KB, MIME type: image/png)
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Summary
[edit]DescriptionComplementary polarity line cutting.png |
English: The method of using complementary polarity exposures for line cutting is shown. Left: Four cut exposures for 13-18 nm half-pitch quadruple patterning. The same cuts can be accomplished by two exposures, one to cut lines (Center: orange) and one to keep a line (Right: black); the two exposures together define the final cut pattern. Ref.: F. T. Chen et al., Proc. SPIE 8326, 83262L (2012). |
Date |
2015-07-04 |
Source | PowerPoint drawing |
Author | Guiding light |
Licensing
[edit]Guiding light at en.wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License.http://www.gnu.org/copyleft/fdl.htmlGFDLGNU Free Documentation Licensetruetrue |
This file is licensed under the Creative Commons Attribution-Share Alike 3.0 Unported license.
Attribution: Guiding light at en.wikipedia
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Original upload log
[edit]The original description page was here. All following user names refer to en.wikipedia.
Date/Time | Dimensions | User | Comment |
---|---|---|---|
2015-07-10 10:54 | 717×437× (20833 bytes) | Guiding light | Changed 'block' to 'keep' for more clear functional description |
2015-07-04 12:06 | 722×437× (20760 bytes) | Guiding light | clarifying labeling |
2015-07-04 09:11 | 716×436× (10632 bytes) | Guiding light | Added labels |
2015-07-04 09:03 | 700×383× (18709 bytes) | Guiding light | Changed to Power Point drawing |
2015-07-04 02:05 | 331×749× (13291 bytes) | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
File history
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Date/Time | Thumbnail | Dimensions | User | Comment | |
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current | 05:58, 13 March 2016 | 717 × 437 (20 KB) | OgreBot (talk | contribs) | (BOT): Reverting to most recent version before archival | |
05:58, 13 March 2016 | 722 × 437 (20 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-07-04 12:06:13 by Guiding light | ||
05:58, 13 March 2016 | 716 × 436 (10 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-07-04 09:11:43 by Guiding light | ||
05:58, 13 March 2016 | 700 × 383 (18 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-07-04 09:03:03 by Guiding light | ||
10:16, 28 February 2016 | 717 × 437 (20 KB) | FastilyClone (talk | contribs) | Transferred from enwp |
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Horizontal resolution | 56.69 dpc |
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Vertical resolution | 56.69 dpc |