File:Different multipatterning techniques.png
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Summary[edit]
| Description |
English: Top: When two features must maintain a minimum distance, they may need to be split up onto different masks (indicated by different colors). Center: By applying self-aligned patterning with a spacer (not shown), fewer masks can be used. Moreover, the leftover gap between spacers may pattern additional features. Bottom: A cut mask uses an opposite polarity feature to separate features that were previously part of one shape. |
| Date | |
| Source |
.svg){kind=small} This diagram was created with Microsoft Excel. |
| Author | Guiding light |
Licensing[edit]
I, the copyright holder of this work, hereby publish it under the following licenses:
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Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
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References[edit]
1. US Patent 8312394, assigned to Synopsys.
2. US Patent 9177797, assigned to TSMC.
3. A. Malika et al., Proc. SPIE 9048, 90481R (2014).
4. R. Baert et al., IITC/MAM 2015.
File history
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 00:11, 5 January 2020 | | 767 × 1,277 (27 KB) | Guiding light (talk | contribs) | put missing spacer label |
| 13:22, 4 January 2020 |  | 769 × 1,277 (27 KB) | Guiding light (talk | contribs) | add cut label | |
| 10:05, 4 January 2020 |  | 769 × 1,277 (26 KB) | Guiding light (talk | contribs) | small drawing correction | |
| 09:51, 4 January 2020 |  | 769 × 1,277 (26 KB) | Guiding light (talk | contribs) | re-label LE3 as LELELE | |
| 09:23, 4 January 2020 |  | 769 × 1,277 (27 KB) | Guiding light (talk | contribs) | Small drawing correction | |
| 09:20, 4 January 2020 |  | 769 × 1,277 (27 KB) | Guiding light (talk | contribs) | New example including LE3 | |
| 11:57, 6 November 2019 |  | 479 × 871 (11 KB) | Guiding light (talk | contribs) | label corrections | |
| 00:45, 6 November 2019 |  | 369 × 652 (6 KB) | Guiding light (talk | contribs) | ||
| 00:44, 6 November 2019 |  | 369 × 652 (6 KB) | Guiding light (talk | contribs) | ||
| 00:43, 6 November 2019 |  | 369 × 652 (6 KB) | Guiding light (talk | contribs) |
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