File:Non-telecentricity.png
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Size of this preview: 800 × 489 pixels. Other resolutions: 320 × 195 pixels | 640 × 391 pixels | 817 × 499 pixels.
Original file (817 × 499 pixels, file size: 49 KB, MIME type: image/png)
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Summary[edit]
| Description |
English: Plot shows example of non-telecentricity, where image shifts with focus. Specifically, it is a 54 nm pitch line-space pattern, a composite of images formed by light illuminated at 2.4, 2.8, 3.5, 4.2, 4.9, 5.6, 6, 6.4, 7.1, 7.8, 8,5, 9.2 and 9.6 degrees incidence onto an EUV mask multilayer. Data from http://henke.lbl.gov/optical_constants/multi2.html |
| Date |
6/17/2014 |
| Source | Excel |
| Author | Guiding light |
Licensing[edit]
Guiding light at en.wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
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Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
This file is licensed under the Creative Commons Attribution-Share Alike 3.0 Unported license.
Attribution: Guiding light at en.wikipedia
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Original upload log[edit]
The original description page was here. All following user names refer to en.wikipedia.
| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2014-06-22 03:08 | 817×499× (49784 bytes) | Guiding light | Added contribution from angles of incidence for ideal dipole illumination (4.2 and 7.8 deg) |
| 2014-06-22 01:58 | 800×417× (41597 bytes) | Guiding light | Added image contributions from more angles of incidence |
| 2014-06-21 13:20 | 800×417× (41941 bytes) | Guiding light | increased extent of pattern (-30 to 30 nm) |
| 2014-06-20 00:21 | 801×417× (40662 bytes) | Guiding light | Added contributions from more angles of incidence |
| 2014-06-19 01:54 | 736×376× (33512 bytes) | Guiding light | Numerical correction |
| 2014-06-19 01:34 | 741×377× (34172 bytes) | Guiding light | Pitch change from 38 nm to 54 nm |
| 2014-06-17 04:18 | 669×376× (30283 bytes) | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
File history
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 01:10, 1 March 2016 | | 817 × 499 (49 KB) | OgreBot (talk | contribs) | (BOT): Reverting to most recent version before archival |
| 01:10, 1 March 2016 |  | 800 × 417 (41 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2014-06-22 01:58:55 by Guiding light | |
| 01:10, 1 March 2016 |  | 800 × 417 (41 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2014-06-21 13:20:38 by Guiding light | |
| 01:10, 1 March 2016 |  | 801 × 417 (40 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2014-06-20 00:21:39 by Guiding light | |
| 01:10, 1 March 2016 |  | 736 × 376 (33 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2014-06-19 01:54:37 by Guiding light | |
| 01:10, 1 March 2016 |  | 741 × 377 (33 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2014-06-19 01:34:20 by Guiding light | |
| 01:10, 1 March 2016 |  | 669 × 376 (30 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2014-06-17 04:18:12 by Guiding light | |
| 10:09, 28 February 2016 |  | 817 × 499 (49 KB) | FastilyClone (talk | contribs) | Transferred from enwp |
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