File:Projected cost trend of SADP.png
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Projected_cost_trend_of_SADP.png (481 × 289 pixels, file size: 8 KB, MIME type: image/png)
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Summary[edit]
| Description |
English: Projected cost of SAMP (Self-aligned multiple patterning) applied with a 193 nm 1.35 NA tool. Cost is normalized by area * number of masks (initial sidewall definition followed by separate cut exposures) used. Features are 3:1 length:half-pitch ratio and positioned side by side. 27 nm half-pitch and 18.5 nm half-pitch assumed to use two cut exposures. 13 nm half-pitch assumed to use three cut exposures. |
| Date | |
| Source | Excel |
| Author | Guiding light |
Licensing[edit]
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Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
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Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
This file is licensed under the Creative Commons Attribution-Share Alike 3.0 Unported license.
Attribution: Guiding light at English Wikipedia
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Original upload log[edit]
The original description page was here. All following user names refer to en.wikipedia.
| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2015-01-11 11:25 | 481×289× (8170 bytes) | Guiding light | |
| 2015-01-11 11:19 | 481×289× (8169 bytes) | Guiding light | Simplified layout data |
| 2015-01-11 10:55 | 493×299× (8579 bytes) | Guiding light | correction |
| 2015-01-11 08:57 | 493×299× (8575 bytes) | Guiding light | Revert back to previous |
| 2015-01-11 08:53 | 493×299× (8688 bytes) | Guiding light | Extra data point |
| 2015-01-11 06:53 | 493×298× (8714 bytes) | Guiding light | SATP included |
| 2015-01-11 04:29 | 433×298× (7771 bytes) | Guiding light | Corrected typo for SAQP |
| 2015-01-10 03:51 | 481×288× (9620 bytes) | Guiding light | Different data points |
| 2015-01-08 14:05 | 643×272× (5608 bytes) | Guiding light | Consistent layout, 38 to 19 nm |
| 2015-01-07 05:57 | 485×273× (7450 bytes) | Guiding light | No SPIMM. Restricted layout considered. |
| 2015-01-06 15:05 | 643×292× (8396 bytes) | Guiding light | Change half-pitch scale to linear |
| 2015-01-06 14:57 | 496×292× (6180 bytes) | Guiding light | Axis scale |
| 2015-01-06 14:55 | 496×292× (6309 bytes) | Guiding light | Removed EUV points |
| 2015-01-06 14:49 | 494×292× (6144 bytes) | Guiding light | More data points |
| 2015-01-04 06:01 | 576×312× (8266 bytes) | Guiding light | Only double patterning. EUV added. |
| 2015-01-03 13:29 | 544×279× (7112 bytes) | Guiding light | Small numerical correction |
| 2015-01-03 13:23 | 544×279× (7119 bytes) | Guiding light | Extra data point |
| 2015-01-03 11:49 | 544×278× (7061 bytes) | Guiding light | New y-axis label |
| 2015-01-03 11:27 | 544×278× (6666 bytes) | Guiding light | Corrections |
| 2015-01-03 11:12 | 544×278× (7483 bytes) | Guiding light | Title change and y-axis scale change (last time) |
| 2015-01-03 11:07 | 544×278× (7215 bytes) | Guiding light | Extra data point |
| 2015-01-03 10:55 | 544×279× (6874 bytes) | Guiding light | Extra data point |
| 2015-01-03 10:39 | 544×279× (6793 bytes) | Guiding light | changed description |
| 2015-01-03 10:32 | 544×279× (6904 bytes) | Guiding light | Actually SAQP included |
| 2015-01-03 10:25 | 544×279× (6748 bytes) | Guiding light | Only SADP |
| 2015-01-03 10:04 | 544×278× (6980 bytes) | Guiding light | small numerical correction |
| 2015-01-03 09:43 | 544×278× (6980 bytes) | Guiding light | Removed line |
| 2015-01-03 09:39 | 544×278× (8539 bytes) | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
File history
Click on a date/time to view the file as it appeared at that time.
| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 01:19, 1 March 2016 | | 481 × 289 (8 KB) | OgreBot (talk | contribs) | (BOT): Reverting to most recent version before archival |
| 01:19, 1 March 2016 |  | 481 × 289 (8 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-01-11 11:19:49 by Guiding light | |
| 01:19, 1 March 2016 |  | 493 × 299 (8 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-01-11 10:55:04 by Guiding light | |
| 01:19, 1 March 2016 |  | 493 × 299 (8 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-01-11 08:57:17 by Guiding light | |
| 01:19, 1 March 2016 |  | 493 × 299 (8 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-01-11 08:53:05 by Guiding light | |
| 01:19, 1 March 2016 |  | 493 × 298 (9 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-01-11 06:53:36 by Guiding light | |
| 01:19, 1 March 2016 |  | 433 × 298 (8 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-01-11 04:29:41 by Guiding light | |
| 01:19, 1 March 2016 |  | 481 × 288 (9 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-01-10 03:51:54 by Guiding light | |
| 01:19, 1 March 2016 |  | 643 × 272 (5 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-01-08 14:05:55 by Guiding light | |
| 01:19, 1 March 2016 |  | 485 × 273 (7 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-01-07 05:57:21 by Guiding light |
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