File:Various dependencies for adsorption vs. time in ALD and other cases.png
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[edit]DescriptionVarious dependencies for adsorption vs. time in ALD and other cases.png |
English: Illustration of various time-dependencies of the amount adsorbed vs. time in gas-solid reactions during reactant exposure (white background) and a following purge/evacuation (grey background): (a) saturating, irreversible reaction (chemisorption); (b) non-saturating continuous reaction; (c) a combination of saturating, irreversible reaction and a continuous reaction component; (d) fully reversible adsorption (either chemisorption or physisorption); (e) partly reversible chemisorption; (f) a combination of saturating, irreversible chemisorption and reversible physisorption; and (g) saturating, irreversible reaction where reactant feed is stopped before saturation occurs. Panel (a) corresponds to ideal atomic layer deposition (ALD). |
Date | |
Source | Own work |
Author | Riikka L. Puurunen, J. Ruud van Ommen |
This image is an updated version of an earlier representation of of how the amount of material adsorbed can vary with time, which was published in a scientific review article: Puurunen, Journal of Applied Physics, volume 97, article number 121301 (year 2005), Figure 8; https://doi.org/10.1063/1.1940727. Jonna Piironen is thanked for help in drawing this image.
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current | 08:13, 18 December 2020 | 2,192 × 946 (147 KB) | Rlpuu (talk | contribs) | Uploaded own work with UploadWizard |
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