File:Wafertraksystem.jpg
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Summary[edit]
An aligner is a major piece of equipment used in semiconductor device fabrication. Trending from upper left to lower right is the wafer-track system of a photolithographic cell that uses the "i-line" from a mercury arc lamp (wavelength 365 nm) to expose photoresist deposited on silicon wafers. Wafers are robotically loaded from a carrier at the left hand of the system and progressively are coated with photoresist, exposed to ultraviolet light, and "developed". The development step involves using a solvent to remove either the exposed (positive photoresist) or unexposed (negative photoresist) portions of the film. In the foreground is a black plastic box containing silicon wafers with a diameter of 6" (150 mm).
Photo taken at HP Labs by Alison Chaiken using a Nikon 995 camera. Note that the light in the room really is yellow!
Licensing[edit]
Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License.http://www.gnu.org/copyleft/fdl.htmlGFDLGNU Free Documentation Licensetruetrue |
This file is licensed under the Creative Commons Attribution-Share Alike 3.0 Unported license. | ||
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This licensing tag was added to this file as part of the GFDL licensing update.http://creativecommons.org/licenses/by-sa/3.0/CC BY-SA 3.0Creative Commons Attribution-Share Alike 3.0truetrue |
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current | 02:11, 3 February 2006 | 2,048 × 1,536 (577 KB) | Chaiken (talk | contribs) | An '''aligner''' is a major piece of equipment used in semiconductor device fabrication.Trending from upper left to lower right is the wafer-track system of a photolithographic aligner that us |
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Metadata
This file contains additional information such as Exif metadata which may have been added by the digital camera, scanner, or software program used to create or digitize it. If the file has been modified from its original state, some details such as the timestamp may not fully reflect those of the original file. The timestamp is only as accurate as the clock in the camera, and it may be completely wrong.
Camera manufacturer | NIKON |
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Camera model | E995 |
Exposure time | 2/55 sec (0.036363636363636) |
F-number | f/2.7 |
ISO speed rating | 100 |
Date and time of data generation | 21:05, 31 January 2006 |
Lens focal length | 8.9 mm |
Orientation | Normal |
Horizontal resolution | 300 dpi |
Vertical resolution | 300 dpi |
Software used | E995v1.7 |
File change date and time | 21:05, 31 January 2006 |
Y and C positioning | Co-sited |
Exposure Program | Normal program |
Exif version | 2.1 |
Date and time of digitizing | 21:05, 31 January 2006 |
Image compression mode | 2 |
APEX exposure bias | 0 |
Maximum land aperture | 2.8 APEX (f/2.64) |
Metering mode | Pattern |
Light source | Unknown |
Flash | Flash did not fire |
Color space | sRGB |