File:30 nm half-pitch EUV shot noise.png

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Description
English: 28 nm half-pitch contact hole local CD uniformity (LCDU) impact vs. dose. The 1s variation is above 0.5 nm, even at the highest doses tested. The size and color indicates acid diffusion rate. Data from C. Sarma et al., Proc. SPIE 8679, 86792U (2013).
Date

2014-12-21

(2014-12-21 (first version); 2015-02-23 (last version))
Source Graphic editor
Author Guiding light

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Guiding light at en.wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
GNU head Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License.
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Attribution: Guiding light at en.wikipedia
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Original upload log

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The original description page was here. All following user names refer to en.wikipedia.
Date/Time Dimensions User Comment
2015-02-23 08:21 824×555× (156030 bytes) Guiding light Newer data set showing more information
2014-12-21 13:51 480×289× (7704 bytes) Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]

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Date/TimeThumbnailDimensionsUserComment
current04:50, 31 March 2016Thumbnail for version as of 04:50, 31 March 2016824 × 555 (152 KB)OgreBot (talk | contribs)(BOT): Reverting to most recent version before archival
04:50, 31 March 2016Thumbnail for version as of 04:50, 31 March 2016480 × 289 (8 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2014-12-21 13:51:53 by Guiding light
10:13, 28 February 2016Thumbnail for version as of 10:13, 28 February 2016824 × 555 (152 KB)FastilyClone (talk | contribs)Transferred from enwp

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