File:EUV OAI.PNG

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EUV_OAI.PNG(566 × 345 pixels, file size: 11 KB, MIME type: image/png)

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Summary

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Description
English: The impact of larger illumination angles on out-of-plane diffraction is significant. The larger angles are required for smaller half-pitches.

References

  • M. Sugawara et al., J. Vac. Sci. Tech. B 21, 2701 (2003).
  • F. T. Chen, Proc. SPIE 5037, pp. 347-357 (2003).
  • R. Petit (ed.), Electromagnetic Theory of Gratings (Springer-Verlag, 1980).
Date 24 June 2009 (original upload date)
Source Transferred from en.wikipedia to Commons.
Author Guiding light at English Wikipedia

Licensing

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Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
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Original upload log

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The original description page was here. All following user names refer to en.wikipedia.
Date/Time Dimensions User Comment
2009-06-24 03:25 566×345× (11382 bytes) Guiding light The impact of larger illumination angles on out-of-plane diffraction is significant. The larger angles are required for smaller half-pitches.

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Date/TimeThumbnailDimensionsUserComment
current10:07, 28 February 2016Thumbnail for version as of 10:07, 28 February 2016566 × 345 (11 KB)FastilyClone (talk | contribs)Transferred from enwp

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