File:EUV pattern shift thru-pitch and thru-focus.png
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EUV_pattern_shift_thru-pitch_and_thru-focus.png (457 × 350 pixels, file size: 14 KB, MIME type: image/png)
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[edit]DescriptionEUV pattern shift thru-pitch and thru-focus.png |
English: Shows EUV pattern shift as a function of pitch and focus. A dipole illumination is assumed, as likely for 7 nm node. The reference pattern is a 12 nm space. Ref.: Proc. SPIE vol. 8679, 86790W (2013) |
Date |
2015-04-04 |
Source | Excel graph |
Author | Guiding light |
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[edit]Guiding light at en.wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
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Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License.http://www.gnu.org/copyleft/fdl.htmlGFDLGNU Free Documentation Licensetruetrue |
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[edit]The original description page was here. All following user names refer to en.wikipedia.
Date/Time | Dimensions | User | Comment |
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2015-04-05 08:52 | 457×350× (14142 bytes) | Guiding light | Different pitches more relevant to 7 nm node |
2015-04-04 10:08 | 549×342× (15418 bytes) | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
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Date/Time | Thumbnail | Dimensions | User | Comment | |
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current | 06:01, 13 March 2016 | ![]() | 457 × 350 (14 KB) | OgreBot (talk | contribs) | (BOT): Reverting to most recent version before archival |
06:01, 13 March 2016 | ![]() | 549 × 342 (15 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-04-04 10:08:22 by Guiding light | |
10:14, 28 February 2016 | ![]() | 457 × 350 (14 KB) | FastilyClone (talk | contribs) | Transferred from enwp |
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Vertical resolution | 56.69 dpc |