File:EUV shot noise dose range vs. diameter.png

From Wikimedia Commons, the free media repository
Jump to navigation Jump to search

EUV_shot_noise_dose_range_vs._diameter.png ‎(481 × 290 pixels, file size: 12 KB, MIME type: image/png)

Captions

Captions

Add a one-line explanation of what this file represents

Summary[edit]

Description
English: For a nominal dose of 15 mJ/cm2, the graph shows the +/- 6 sigma EUV (13.5 nm) dose limits (red lines) from shot noise, as a function of exposed diameter. An error of 1 mJ/cm2 results in ~2 nm error (Refs: (1)P-Y. Yan et al., J. Micro/Nanolith. MEMS MOEMS. 10(3), 033011(2011).; (2)N. Davydova et al., Proc. SPIE vol. 7985, 79850X (2011).; (3)F. A. J. M. Driessen et al., Proc. SPIE vol. 8166, 81660Z (2011).).
Date

6/27/2014

(2014-06-27 (first version); 2014-06-27 (last version))
Source Excel plot
Author Guiding light

Licensing[edit]

Guiding light at en.wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
GNU head Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License.
w:en:Creative Commons
attribution share alike
This file is licensed under the Creative Commons Attribution-Share Alike 3.0 Unported license.
Attribution: Guiding light at en.wikipedia
You are free:
  • to share – to copy, distribute and transmit the work
  • to remix – to adapt the work
Under the following conditions:
  • attribution – You must give appropriate credit, provide a link to the license, and indicate if changes were made. You may do so in any reasonable manner, but not in any way that suggests the licensor endorses you or your use.
  • share alike – If you remix, transform, or build upon the material, you must distribute your contributions under the same or compatible license as the original.
You may select the license of your choice.

Original upload log[edit]

The original description page was here. All following user names refer to en.wikipedia.
Date/Time Dimensions User Comment
2014-06-27 22:17 481×290× (12318 bytes) Guiding light 1. Smoothed red 6s limit lines 2. Changed grid lines to dotted 3. Superscript for cm2
2014-06-27 10:54 481×290× (11545 bytes) Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]

File history

Click on a date/time to view the file as it appeared at that time.

Date/TimeThumbnailDimensionsUserComment
current06:01, 13 March 2016Thumbnail for version as of 06:01, 13 March 2016481 × 290 (12 KB)OgreBot (talk | contribs)(BOT): Reverting to most recent version before archival
06:01, 13 March 2016Thumbnail for version as of 06:01, 13 March 2016481 × 290 (11 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2014-06-27 10:54:25 by Guiding light
10:09, 28 February 2016Thumbnail for version as of 10:09, 28 February 2016481 × 290 (12 KB)FastilyClone (talk | contribs)Transferred from enwp

You cannot overwrite this file.

There are no pages that use this file.

Metadata

This file contains additional information such as Exif metadata which may have been added by the digital camera, scanner, or software program used to create or digitize it. If the file has been modified from its original state, some details such as the timestamp may not fully reflect those of the original file. The timestamp is only as accurate as the clock in the camera, and it may be completely wrong.

Retrieved from "https://commons.wikimedia.org/w/index.php?title=File:EUV_shot_noise_dose_range_vs._diameter.png&oldid=465503518"