File:EUV shot noise dose vs feature size.png
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EUV_shot_noise_dose_vs_feature_size.png (637 × 283 pixels, file size: 13 KB, MIME type: image/png)
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Summary
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| Description |
English: This graph shows minimum EUV dose vs. feature size, for 10% variation, corresponding to 3600 absorbed photons per square feature. A fixed absorption thickness keeps photon number fixed (effectively zero attenuation length), while a fixed aspect ratio has thinner absorber (less absorption) for smaller feature size. For the latter case, a 1/e attenuation length of 50 nm is assumed. The required dose goes from inverse square dependence on feature size to almost inverse cube. |
| Date |
2015-05-25 |
| Source | Excel |
| Author | Guiding light |
Licensing
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Guiding light at en.wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
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Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
This file is licensed under the Creative Commons Attribution-Share Alike 3.0 Unported license.
Attribution: Guiding light at en.wikipedia
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Original upload log
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The original description page was here. All following user names refer to en.wikipedia.
| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2015-06-02 14:02 | 637×283× (12908 bytes) | Guiding light | |
| 2015-06-02 04:30 | 636×306× (15570 bytes) | Guiding light | back to two curves |
| 2015-06-02 00:13 | 481×289× (8836 bytes) | Guiding light | Reverted to version as of 23:27, 24 May 2015 |
| 2015-06-01 11:07 | 637×283× (13058 bytes) | Guiding light | Added second curve to compare two different assumptions |
| 2015-05-24 23:27 | 481×289× (8836 bytes) | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 06:01, 13 March 2016 | | 637 × 283 (13 KB) | OgreBot (talk | contribs) | (BOT): Reverting to most recent version before archival |
| 06:01, 13 March 2016 |  | 636 × 306 (15 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-06-02 04:30:22 by Guiding light | |
| 06:01, 13 March 2016 |  | 637 × 283 (13 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-06-01 11:07:38 by Guiding light | |
| 06:01, 13 March 2016 |  | 481 × 289 (9 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-05-24 23:27:07 by Guiding light | |
| 10:15, 28 February 2016 |  | 637 × 283 (13 KB) | FastilyClone (talk | contribs) | Transferred from enwp |
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