File:Immersionslithografie - Lens Showerhead.svg
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Size of this PNG preview of this SVG file: 800 × 449 pixels. Other resolutions: 320 × 180 pixels | 640 × 359 pixels | 1,024 × 575 pixels | 1,280 × 719 pixels | 2,560 × 1,438 pixels.
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Summary[edit]
| Description |
English: Schematic representation of an immersion lithography system using water as the immersion medium between the last lens and the wafer. The position of the water under the lens is controled by a continuous flow of the water and an air curtain on the side.
Deutsch: Schematischer Aufbau eines Immersionslithografiesystems mit Wasser als Immersionsmedium zwischen der letzten Linse und dem Wafer. Die Position des Wassers unter der Linse wird dabei durch eine kontinuierliche Strömung und einem Luftschleier am Rand gehalten. |
| Date | |
| Source | Own work |
| Author | Cepheiden |
| SVG development |  This diagram was created with Inkscape, or with something else.  This diagram uses embedded text that can be easily translated using a text editor. |
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Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 01:32, 23 January 2012 | | 1,024 × 575 (11 KB) | Cepheiden (talk | contribs) | small modifications |
| 12:10, 9 January 2012 |  | 1,024 × 575 (10 KB) | Cepheiden (talk | contribs) | {{Information |Description ={{en|1=Schematic representation of an immersion lithography system using water as the immersion medium between the last lens and the wafer. The position of the water under the lens is controled by a continuous flow of the wa |
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